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| | Mass Flow Controller | | Certification | |
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| | Customer: | NULL |
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| | Customer P/N: | NULL |
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| | Serial Number: | C110112019 |
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| | Moder Number: | FC-770A |
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| | Specifications | | |
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| | Calibration Date: | 5/12/2015 |
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| Calibration Factor: | 0.599 |
| | Flow： | 200 |
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| Zero Offset: | 0.003V |
| | Rate: | SCCM |
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| Test Gas: | N2 |
| | Gas: | SiH4 |
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| Semi Gas: | NA |
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| | Set Point % | Set Flow |
| Actual Flow |
| Error(FS) |
| | 0% |
| 0.000 |
| 0.120 |
| 0.060% |
| | 25% |
| 50.000 |
| 49.700 |
| -0.150% |
| | 50% |
| 100.000 |
| 101.230 |
| 0.615% |
| | 75% |
| 150.000 |
| 151.300 |
| 0.650% |
| | 100% |
| 200.000 |
| 199.650 |
| -0.175% |
| | Comments: |
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| | The Product described in this certificate was inspected and functionally tested in accordance with the customer purchase order,drawings, and specifications,and has satisified Flows Instruments specification,inspection and testing,unless otherwise stated.Copies if the required inspection and test reports of the product are on file and available upon request. | | The equipment used to calibrate the above device is in current calibration,which is traceable to the National Institute of Standards and Technology(NIST) or other equivalent intemational measurement standard. | | FLOWS INSTRUMENTS Technology Co. Ltd |
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